%0 Journal Article %J JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A %D 2000 %T Optimization of n+ uc-Si:H contact layer for low leakage current in a-Si:H thin film transistors %A Murthy, R V R %A Servati, P %A Nathan, A %A Chamberlain, S G %N 2 %P 685-687 %V 18