%0 Conference Paper %B 2nd International Conf. on Semiconductor Technology (ISTC), Proceedings of the Electrochemical Society %D 2002 %T Amorphous silicon TFT circuit integration %A Nathan, A %A Servati, P %A Karim, K S %C Tokyo, Japan %P 18-35 %V 2002-17 %8 11/09/2002