%0 Conference Paper %B IEEE MEMS-2014 %D 2014 %T Fabrication and Testing of Piezoelectric Hybrid Paper for MEMS Applications %A Suresha K. Mahadeva, Konrad Walus and Boris Stoeber %I IEEE MEMS %X We have developed and demonstrated a new inexpensive and environmentally friendly functional paper based material that can be used as a piezoelectric substrate for sensing applications. The process involves embedding nanostructured barium titanate (BaTiO3) into a stable matrix of wood fibers via fiber functionalization. This is achieved by employing a layer-by-layer approach, and results in the creation of a positively charged surface on the wood fibers. The treated wood fibers are then immersed in a BaTiO3 suspension, leading to the electrostatic binding of the BaTiO3 nanoparticles. We have investigated hybrid paper samples with five different BaTiO3 concentrations (8 -48 wt%), and we have found the highest piezoelectric coefficient at 48 wt% BaTiO3. Our study suggests that functionalizing wood cellulose fibers with nanostructured BaTiO3 is a promising approach to enhancing the functionality and value of paper for developing low-cost microelectromechanical systems (MEMS). %8 26/01/2014