%0 Conference Paper %B 13th Int. Conference on Solid-State Sensors and Actuators, Transducer's 05 , Technical Digest %D 2005 %T {MEMS}-based sonoporation devices for intratumoral gene delivery %A Siu, T %A Trivedi, D %A Rohling, R %A Chiao, M %C Seoul, Korea %P 205-208 %9 inproceedings