%0 Journal Article %J ASME Journal of Medical Devices %D 2009 %T Formation of Uniform Microspheres Using a Perforated Silicon Membrane: A Preliminary Study %A Song, K -Y %A Chiao, M %A Stoeber, B %A Hafeli, U %A Gupta, M M %A Zhang, W J %P 034503 %V 3 %9 article