%0 Conference Paper %B The Conference on Lasers and Electro-Optics and The International Quantum Electronics Conference, (CLEO/IQEC 2009) %D 2009 %T Microfabricated Out-of-Plane Scanning Microlens for Raman Spectroscopy %A Siu, C P B %A Zeng, H %A Chiao, M %C Baltimore, Maryland, USA %9 conference