%0 Journal Article %J Sensors \& Actuators: A. Physical %D 2010 %T Development of a Compensated Capacitive Pressure and Temperature Sensor Using Adhesive Bonding and Chemical-Resistant Coating for Multiphase Chemical Reactors %A Mohammadi, A R %A Bennington, C %A Chiao, M %P 471-480 %V 163 %9 article