%0 Journal Article %J Journal of Microsystem Technologies %D 2010 %T Development of A Low Cost Capacitance Pressure and Temperature Sensor Using A Combined Adhesive Fabrication Technique Suitable for High Temperature and Harsh Environment of Multi-phase Chemical Reactors %A Mohammadi, A R %A Bennington, C %A Chiao, M %P 149-160 %V 17 %9 article