%0 Journal Article %J Journal of Micromechanics and Microengineering %D 2011 %T Development of a Combined Piezoresistive Pressure and Temperature Sensor Using Chemical Protective Coating for Kraft Pulp Digester Process Monitoring %A Mohammadi, A R %A Bennington, C %A Chiao, M %P 015009 %V 21 %9 article