%0 Journal Article %J Proc. SPIE, Photonics North 2013 %D 2013 %T Fully-Etched Grating Coupler with Low Back Reflection %A Wang, Yun %A Shi, Wei %A Wang, Xu %A Flueckiger, Jonas %A Yun, Han %A Jaeger, Nicolas %A Chrostowski, Lukas %P 89150U %V 8915 %X A fully-etched grating coupler with improved back reflection and bandwidth is demonstrated in this paper. It can also be made in compact patterns with much smaller footprints than conventional, fully-etched grating couplers with long adiabatic tapers. Sub-wavelength gratings were employed to form the effective index areas between the major gratings. Our grating has a measured 3-dB bandwidth of 64.37 nm with a back reflection of -14 dB. %8 06/2013