%0 Conference Paper %B IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) %D 2012 %T High-precision dry micro-electro-discharge machining of carbon-nanotube forests with ultralow discharge energy %A Tanveer Saleh and Kenichi Takahata, Masoud Dahmardeh Anas Bsoul Alireza Nojeh %8 29/01/2012