%0 Journal Article %J APPLIED PHYSICS LETTERS %D 2011 %T Hot carrier effect on gate-induced drain leakage current in high-k/metal gate n-channel metal-oxide-semiconductor field-effect transistors %A Chih-Hao Dai and Cheng Tung Huang, Ting-Chang Chang Ann-Kuo Chu Yuan-Jui Kuo Szu-Han Ho Tien-Yu Hsieh Wen-Hung Lo Ching-En Chen Jou-Miao Shih Wan-Lin Chung Bai-Shan Dai Hua-Mao Chen Guangrui Xia Osbert Cheng %P 012106 %V 99 %8 07/2011