%0 Journal Article %J Sensors and Actuators B: Chemical %D 2011 %T Characterization of postfabricated parylene C coatings inside PDMS microdevices %A Flueckiger, Jonas %A Bazargan, Vahid %A Stoeber, Boris %A Cheung, Karen %I Elsevier %N 1 %P 864-874 %V 160 %8 12/2011