%0 Journal Article %J Microelectromechanical Systems, Journal of %D 2003 %T Implantable multichannel electrode array based on SOI technology %A Cheung, Karen %A Djupsund, Kaj %A Dan, Yang %A Lee, Luke %K arrays, biomedical electrodes, drug delivery systems, microelectrodes, microfluidics, neurophysiology, probes, silicon-on-insulator, 25 micron, 6 mm, 80 micron, SOI technology, Si, drug delivery, electrical recording, electrical stimulation, implantable m %P 179-184 %V 12 %Z TY - JOUR %@ 1057-7157