%0 Journal Article %J 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AL, USA %D 2008 %T Micro-Electro-Discharge Machining by MEMS Actuators with Planar Electrodes Microfabricated on the Work Surfaces %A Chaitanya, C R A %A Takahata, K %P 375-378 %8 2008