%0 Journal Article %J IEEE Int. Symposium on Industrial Electronics (ISIE2007) %D 2007 %T Full-gap positioning of parallel-plate electrostatic MEMS using on-off control %A Mol, Lukas %A Rocha, Luis %A Cretu, Edmond %A Wolffenbuttel, Reinoud %C Vigo, Spain %I IEEE %P 1464-1468 %8 4-7/Jun/2007 %9 inproceedings %@ 1 4244 0755 9