%0 Conference Paper %B DTIP 2008 ( Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS %D 2008 %T Noise-based Optimisation and Noise analysis for Resonant MEMS structures %A Sharma, Mrigank %A Kannan, Akila %A Cretu, Edmond %C Nice, France %I http://documents.irevues.inist.fr/bitstream/2042/16865/1/dtip08085.pdf %U http://documents.irevues.inist.fr/bitstream/2042/16865/1/dtip08085.pdf %X This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling. %8 9-11/Apr/2008