%0 Journal Article %J Proc. 12th IEEE Int?l Conf. Micro Electro Mechanical Systems (MEMS 1999) %D 1999 %T A Novel Micro Electro-Discharge Machining Method Using Electrodes Fabricated by the LIGA Process %A Takahata, K %A Shibaike, N %A Guckel, H %P 238-243