%0 Journal Article %J Proc. 3rd Int?l Workshop on High Aspect Ratio Microstructure Technology?(HARMST 1999) %D 1999 %T High-Aspect-Ratio WC-Co Microstructure Produced by the Combination of LIGA and Micro-EDM %A Takahata, K %A Shibaike, N %A Guckel, H %P 100-101