%0 Journal Article %J Proc. 11th IEEE Int?l Conf. Solid-State Sensors, Actuators and Microsystems (Transducers 2001) %D 2001 %T Parallel Discharge with Partitioned Electrode Arrays for Accelerated Batch Mode Micro-EDM %A Takahata, K %A Gianchandani, Y B %P 1598-1601