%0 Journal Article %J IEEE/ASME J. Microelectromechanical Systems %D 2005 %T A Micromachined Kelvin Probe with Integrated Actuator for Microfluidic and Solid-State Applications %A Chu, L L %A Takahata, K %A Selvaganapathy, P %A Gianchandani, Y B %A Shohet, J L %N 4 %P 691-698 %V 14