@article { 00a_Cretu, title = {Spectral analysis through electromechanical coupling}, journal = {Sensors and Actuators A: Physical}, volume = {A85}, number = {Issues 1-3}, year = {2000}, note = {Sensors and Actuators A: Physical Volume 85, Issues 1-3 , 25 August 2000, Pages 23-32 E. Cretu, M. Bartek and R.F. Wolffenbuttel [2000] -_Spectral Analysis Through Electromechanical Coupling_, in Sensors and Actuators A, vol. A85, No 1-3, 25 Aug. 2000, pp. 23-32}, month = {25 August}, pages = {23-32}, type = {article}, abstract = {A general dynamic model for a momentum-actuated accelerometer is constructed, where both differential and common-mode actuation voltages are considered. The equivalent quasi-static model is applied to design a measurement scheme for low-frequency accelerations. A more general method for real-time spectral analysis of mechanical vibrations is presented, which relies on a feedback loop based on capacitive sensing, on-chip signal conditioning and electrostatic actuation. Both common- and differential-mode voltages are used to tune the accelerometer spectral characteristic, in order to extract the spectral component set by the electrostatic actuation.}, keywords = {Accelerometer; MEMS; Spectral analysis}, URL = {http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-41248CH-4&_coverDate=08%2F25%2F2000&_alid=187359548&_rdoc=1&_fmt=&_orig=search&_qd=1&_cdi=5282&_sort=d&view=c&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=770bfb345ec3440cb0a68473c}, author = { Cretu, E. and Bartek, M. and Wolffenbuttel, R.F} }