@inproceedings { 00d_Cretu, title = {Intelligent sensors in silicon - an industrial perspective}, journal = {Proc. of Microtechnology in Metrology and Metrology in Microsystems 2000}, year = {2000}, note = {E.Cretu, R. Diels [2000] -_ Intelligent sensors in silicon - an industrial perspective_, in Microtechnology in Metrology and Metrology in Microsystems, Delft, The Netherlands, 31 Aug-1 Sept 2000, pp. 59-68}, month = {31 Aug-1 Sept 20}, pages = {59-68}, type = {inproceedings}, address = {Delft, The Netherlands}, author = { Cretu, E. and Diels, R.} }