@inproceedings { 04g_Graaf-Cretu, title = {Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sinewave oscillator}, journal = {MME_04, Micromechanics Europe Workshop, Proceedings of, September 5-7, 2004, Leuven, Belgium}, year = {2004}, month = {September 5-7}, pages = {pp. 53-56}, type = {inproceedings}, address = {Leuven, Belgium}, author = {de Graaf, Ger and Mol, Lukas and Rocha, L.A. and Cretu, E. and Wolffenbuttel, R.F.} }