@article { 05d_Graaf-Cretu, title = {Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement}, journal = {(IOP) Journal of Micromechanics and Microengineering}, volume = {15}, number = {7}, year = {2005}, month = {July}, pages = {S103-S108}, type = {article}, URL = {http://www.iop.org/EJ/abstract/-search=24199841.1/0960-1317/15/7/015}, author = { Graaf, de G. and Mol, L. and Rocha, L.A. and Cretu, E. and Wolffenbuttel, R.F.} }