@article { 03c_Rocha-Cretu, title = {Stability of a micromechanical pull-in voltage reference}, journal = {(IEEE) Transactions on Instrumentation and Measurement}, volume = {52}, number = {3}, year = {2003}, month = {April}, pages = {457-460}, type = {article}, abstract = {The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100-/spl mu/m length, 3-/spl mu/m width, and 11-/spl mu/m thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstrated an initial drift of -12 mV over 10 days and stabilized within the 500-/spl mu/V measurement uncertainty. The measured temperature coefficient of -1 mV/K is in good agreement with the analysis and is due to the combined effect of thermal expansion and the temperature dependence of the Young's modulus in silicon.}, keywords = {Young's modulus circuit stability integrated circuit design measurement uncertainty micromechanical devices reference circuits thermal expansion 100 micron 11 micron 3 micron 9.1 V Young's modulus measurement uncertainty microbeams micromechanical p}, URL = {http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1202073&isnumber=27069&punumber=19&k2dockey=1202073}, author = { Rocha, L.A. and Cretu, E. and Wolffenbuttel, R.F.} }