@inproceedings { stoeber2007c1, title = {High Mechanical Bandwidth Polysilicon Micromirrors for Large Area / High Deflection Angle Micromirror Arrays}, journal = {20th IEEE Canada CCECE 2007}, year = {2007}, month = {01/04/2007}, address = {Vancouver, BC, Canada}, author = {R. Hoskinson and I. Mansoor and B. Stoeber} }