@article { Murthy00a, title = {Optimization of n+ uc-Si:H contact layer for low leakage current in a-Si:H thin film transistors}, journal = {JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, volume = {18}, year = {2000}, pages = {685-687}, author = {R.V.R. Murthy and P. Servati and A. Nathan and S.G. Chamberlain} }