@inproceedings { billyMEMS, title = {Magnetically actuated scanning microlens for NIR Raman spectroscopy}, journal = {20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007)}, year = {2007}, pages = {735-738}, type = {inproceedings}, address = {Kobe, Japan}, author = { Siu, C.P.B. and Zeng, H. and Chiao, M. } }