@book { J.B.-Kim:2007ad, title = {{MEMS} packaging and thermal issues in reliability}, series = {Nanotechnology Handbook}, editor = {Bhushan, B.}, year = {2007}, publisher = {Springer Verlag}, type = {incollection}, edition = {2nd}, chapter = {Part G}, author = { Kim, J.B. and Chen, Y.-T. and Chiao, M. and Lin, L. } }