@article { reza-mst, title = {Development of A Low Cost Capacitance Pressure and Temperature Sensor Using A Combined Adhesive Fabrication Technique Suitable for High Temperature and Harsh Environment of Multi-phase Chemical Reactors}, journal = {Journal of Microsystem Technologies}, volume = {17}, number = {1}, year = {2010}, pages = {149-160}, type = {article}, author = { Mohammadi, A.R. and Bennington, C. and Chiao, M. } }