@article { Wang2013etchedGC, title = {Fully-Etched Grating Coupler with Low Back Reflection}, journal = {Proc. SPIE, Photonics North 2013}, volume = {8915}, year = {2013}, month = {06/2013}, pages = {89150U}, abstract = {A fully-etched grating coupler with improved back reflection and bandwidth is demonstrated in this paper. It can also be made in compact patterns with much smaller footprints than conventional, fully-etched grating couplers with long adiabatic tapers. Sub-wavelength gratings were employed to form the effective index areas between the major gratings. Our grating has a measured 3-dB bandwidth of 64.37 nm with a back reflection of -14 dB.}, author = {Yun Wang and Wei Shi and Xu Wang and Jonas Flueckiger and Han Yun and Nicolas A. F. Jaeger and Lukas Chrostowski} }