@article { , title = {Implantable multichannel electrode array based on SOI technology}, journal = {Microelectromechanical Systems, Journal of}, volume = {12}, number = {2}, year = {2003}, note = {TY - JOUR}, pages = {179-184}, keywords = {arrays, biomedical electrodes, drug delivery systems, microelectrodes, microfluidics, neurophysiology, probes, silicon-on-insulator, 25 micron, 6 mm, 80 micron, SOI technology, Si, drug delivery, electrical recording, electrical stimulation, implantable m}, ISBN = {1057-7157}, author = {Cheung, Karen C. and Djupsund, Kaj and Dan, Yang and Lee, Luke P} }