@proceedings { Xia2008, title = {PDSOI nMOSFETs with Embedded Phosphorus-doped SiC Stressors for CMOS Technology}, year = {2008}, month = {07/2008}, author = {Z. Ren, G. Pei, J. Li, F. Yang, R. Takalkar, K. Chan, G. Xia, Z. Zhu, A. Madan, T. Pinto, T.Adam, J. Miller, A. Dube, L. Black, J. W. Weijtmans, B. Yang, E. Harley, A. Chakravarti, T.Kanarsky, I. Lauer, D.-G. Park, D. Sadana, and G. Shahidi} }