@article { Xia2005b, title = {Characterization of ultrathin strained-Si channel layers of n-MOSFETs using transmission electron microscopy}, journal = {Materials Research Society Symposium Proceedings}, volume = {864}, year = {2005}, month = {03/2005}, author = {Dalaver Anjum, Jian Li, Guangrui Xia, Judy L. Hoyt, and Robert Hull} }