@article { Xia2005a, title = {Nanoscale stress analysis of strained-Si metal-oxide-semiconductor field-effect transistors by quantitative electron diffraction contrast imaging}, journal = {Applied Physics Letters}, volume = {87}, year = {2005}, month = {11/2005}, author = {J. Li, D. Anjum, R. Hull, G. Xia and J. L. Hoyt} }