@article { Takahata2008d, title = {A Cavity-Less Micromachined Capacitive Pressure Sensor for Wireless Operation in Liquid Ambient}, journal = {Proc. Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), USA}, year = {2008}, month = {2008}, author = {Takahata, K. and Gianchandani, Y.B.} }