@article { Takahata2008c, title = { Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and its Wireless Telemetry Application}, journal = {Sensors}, volume = {8}, year = {2008}, month = {2008}, pages = {2317-2330 }, author = {Takahata, K. and Gianchandani, Y.B.} }