@article { Takahata2008a, title = {Micro-Electro-Discharge Machining by MEMS Actuators with Planar Electrodes Microfabricated on the Work Surfaces}, journal = {21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AL, USA}, year = {2008}, month = {2008}, pages = {375-378}, author = {Chaitanya, C.R.A. and Takahata, K.} }