@article { mol_full-gap_200, title = {Full-gap positioning of parallel-plate electrostatic MEMS using on-off control}, journal = {IEEE Int. Symposium on Industrial Electronics (ISIE2007)}, year = {2007}, month = {4-7/Jun/2007}, pages = {1464-1468}, publisher = {IEEE}, type = {inproceedings}, address = {Vigo, Spain}, ISBN = {1 4244 0755 9}, author = { Mol, Lukas and Rocha, Luis A. and Cretu, Edmond and Wolffenbuttel, Reinoud F. } }