@article { mol_accurate_200, title = {Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage}, journal = {18th MicroMechanics Europe}, year = {2007}, month = {16-18/Sep/2007}, pages = {355-358}, type = {inproceedings}, address = {Guimaraes, Portugal}, ISBN = {978 972 98603 3 1}, author = { Mol, Lukas and Rocha, Luis A. and Cretu, Edmond and Wolffenbuttel, Reinoud F. } }