@inproceedings { sharma007, title = {Noise-based Optimisation and Noise analysis for Resonant MEMS structures }, journal = {DTIP 2008 ( Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS}, year = {2008}, month = {9-11/Apr/2008}, publisher = {http://documents.irevues.inist.fr/bitstream/2042/16865/1/dtip08085.pdf}, organization = {http://documents.irevues.inist.fr/bitstream/2042/16865/1/dtip08085.pdf}, address = {Nice, France}, abstract = {This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling.}, URL = {http://documents.irevues.inist.fr/bitstream/2042/16865/1/dtip08085.pdf}, author = {Mrigank Sharma;Akila Kannan;Edmond Cretu} }