@article { Takahata1995a, title = {An Electrostatic Micro Wobble Motor for Nondestructive Testing}, journal = {Proc. 1st Int?l Micromachine Symp.}, year = {1995}, pages = {147-150}, author = {Nakamura, K. and Takahata, K. and Ono, A. and Ogura, H. and Aoki, S.} }