@article { Takahata1996a, title = {Fine Surface Finishing Method for 3-Dimensional Micro Structures}, journal = {Proc. 9th IEEE Int?l Workshop on Micro Electro Mechanical Systems (MEMS 1996)}, year = {1996}, pages = {73-78}, author = {Takahata, K. and Aoki, S. and Sato, T.} }