@article { Takahata1999b, title = {A Novel Micro Electro-Discharge Machining Method Using Electrodes Fabricated by the LIGA Process}, journal = {Proc. 12th IEEE Int?l Conf. Micro Electro Mechanical Systems (MEMS 1999)}, year = {1999}, pages = {238-243}, author = {Takahata, K. and Shibaike, N. and Guckel, H.} }