@article { Takahata2000a, title = {High-Aspect-Ratio WC-Co Microstructure Produced by the Combination of LIGA and Micro-EDM}, journal = {Microsystem Technologies}, volume = {6}, year = {2000}, pages = {175-178}, author = {Takahata, K. and Shibaike, N. and Guckel, H.} }