@article { Takahata2001c, title = {Batch Mode Micro-EDM for High-Density and High-Throughput Micromachining}, journal = {Proc. 14th IEEE Int?l Conf. Micro Electro Mechanical Systems (MEMS 2001)}, year = {2001}, pages = {72-75}, author = {Takahata, K. and Gianchandani, Y.B.} }