@article { Takahata2005a, title = {A Micromachined Kelvin Probe with Integrated Actuator for Microfluidic and Solid-State Applications}, journal = {IEEE/ASME J. Microelectromechanical Systems}, volume = {14}, year = {2005}, pages = {691-698}, author = {Chu, L.L. and Takahata, K. and Selvaganapathy, P. and Gianchandani, Y.B. and Shohet, J.L.} }