@article { Takahata2007a, title = {Bulk-Metal-Based MEMS Fabricated by Micro-Electro-Discharge Machining}, journal = {Proc. 20th IEEE Canadian Conference on Electrical and Computer Engineering (CCECE 2007)}, year = {2007}, pages = {1-4}, author = {Takahata, K. and Gianchandani, Y.B.} }