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Xu Wang, Wei Shi, Michael Hochberg, Kostas Adam, Ellen Schelew, Jeff F. Young, Nicolas A. F. Jaeger, Lukas Chrostowski, "Lithography Simulation for the Fabrication of Silicon Photonic Devices with Deep-Ultraviolet Lithography", IEEE International Conference on Group IV Photonics (GFP), San Diego, California, pp. 288-290, 08/2012. Abstract Tagged XML BibTex