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2012
Xu Wang, Wei Shi, Michael Hochberg, Kostas Adam, Ellen Schelew, Jeff F. Young, Nicolas A. F. Jaeger, Lukas Chrostowski, "Lithography Simulation for the Fabrication of Silicon Photonic Devices with Deep-Ultraviolet Lithography", IEEE International Conference on Group IV Photonics (GFP), San Diego, California, pp. 288-290, 08/2012. Abstract Tagged XML BibTex